| 摘要 |
A system and method for directing metal or ceramic particles toward a substrate (18) in a vacuum chamber includes a powder hopper (11), an enclosure (12) containing multiple differentially pumped vacuum chambers (19), a charging lamp (13), a tube (14), multiple charging and heating diodes 15, and an electromagnetic field generating device (EFGD) (17). The hopper (11) holds metal or ceramic particles, the chambers (19) propel the particles through the tube (14) towards substrate (18) positioned close to the tube, charging lamp (13) charges the particles, diodes (15) are used to heat the particles, and the EFGD (17) controls the direction of the particles propelled out of the tube.
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