PHOTODIODE WITH DIFFUSION LAYER OF DISPERSION-DISTRIBUTION PATTERN AND FABRICATION METHOD THEREOF AND SUBSTRATE AND ELECTRONIC MACHINE THEREBY

摘要

PURPOSE: A photodiode with a diffusion layer of a dispersion-distribution pattern is provided to receive more light by making a light receiving area relatively broader as compared with a contact area. CONSTITUTION: A substrate(200) is prepared. A buried layer(10) is formed on the substrate. An epitaxial layer(20) is formed on the buried layer. A deep diffusion layer(30) is formed on the epitaxial layer through an ion implantation method. A shallow diffusion layer(40) of a discrete distribution bar type is formed on the epitaxial layer through an ion implantation method. An anode electrode(50) is formed on the deep diffusion layer.