GAS INLET MECHANISM FOR CVD-METHOD AND DEVICE,申请号KR20037003725-传众专利搜索

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发明名称	GAS INLET MECHANISM FOR CVD-METHOD AND DEVICE
摘要
申请公布号	KR20030033062(A)	申请公布日期	2003.04.26
申请号	KR20037003725	申请日期	2003.03.13
申请人		发明人
分类号	C23C16/44;C23C16/30;C23C16/455;C30B25/14;C30B29/40;H01L21/205	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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