发明名称 TOOL FOR APPLYING RESILIENT TAPE TO CHUCK USED FOR GRINDING OR POLISHING WAFERS
摘要 <p>A tool and method for applying an insert to the face of a chuck so that holes in the insert register with holes in the chuck, includes a removable vacuum chamber that is brought into sealing engagement with the chuck and that is indexed with respect to the chuck by means of locating pins. The removable vacuum chamber includes a stamp on which the insert is mounted and to which the insert is indexed by locating pins. The stamp is advanced until an adhesive surface of the insert contacts the face of the chuck. Thereafter, the vacuum is relieved and the vacuum chamber is removed from the chuck. The tool insures that the holes in the insert register with those in the face of the chuck, and the absence of air within the vacuum chamber prevents air from being trapped between the insert and the face of the chuck.</p>
申请公布号 KR20030033084(A) 申请公布日期 2003.04.26
申请号 KR20037004409 申请日期 2003.03.27
申请人 发明人
分类号 H01L21/00;B24B1/00;B24B37/30;H01L21/304;H01L21/683 主分类号 H01L21/00
代理机构 代理人
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