| 摘要 |
<p>PURPOSE: To enable a means for monitoring the complete state of pressure settings or the like to be easily and compactly incorporated into a valve unit having a fluid pressure control mechanism. CONSTITUTION: The valve unit comprises a base-mounted valve and a fluid pressure controller 4 integrated together, the fluid pressure controller controlling output pressure. The fluid pressure controller comprises a pressure control part 42 for controlling the output pressure according to an electric signal of an externally set pressure, and a booster part 43 which increases the flow of pressure fluid from the pressure control part to output it, with the control part and the booster part being integrated together. An output of a pressure sensor 74 detecting the pressure of the fluid outputted from the booster part is fed back to a signal control part 45 controlling the pressure control part, and a function is provided for outputting a signal indicative of the completion of the pressure setting for monitoring when the output of the pressure sensor is equal to the set pressure.</p> |
