| 摘要 |
PROBLEM TO BE SOLVED: To do away with processing unevenness due to glitch noise generated when a multi-bit D/A converter is used for controlling of deflection voltage, in the course of processing by convergent charged particle beam. SOLUTION: Deflection control of charged particle beams is carried out by either (1) adding modulation signal of any waveform to output of deflection control signals, (2) outputting at random output of deflection control signals, or (3) using a one-bit (one bit-stream) D/A converter, or, by a combination of those.
|
