| 摘要 |
PROBLEM TO BE SOLVED: To provide a soft X-ray exposure system which is equipped with a multilayered film reflecting mirror which is capable of preventing photoelectrons from colliding against it and furthermore preventing static electricity from being discharged. SOLUTION: A multilayered film reflecting mirror 50 is composed of an insulating quartz glass board 51 and a conductive multilayer film 53 of Mo/Si formed on the reflecting surface of the glass board 51. The sides of the reflecting mirror 50 are held by holding members 55 on the inner wall of a lens tube 57. A lead wire 59 is electrically connected to a part of the multilayer film 53. The lead wire 59 is extended outside of the lens tube 57 and connected to the negative electrode of a power supply 61. The lens tube 57 is electrically connected to the positive electrode of the power supply 61 and grounded. Photoelectrons 65 generated by irradiation with a soft X-ray 63 are moved in the direction of the lens tube 57 which is kept at a relatively positive potential, so that the photoelectrons 65 are prevented from colliding against the opposed multilayer film 53.
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