发明名称 CUTTING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a cutting device which can realize alignment for detecting a region to be cut of a work piece held by a chuck table readily and cut the work piece tilting to a surface perpendicular to a surface of a work piece without requiring the need for resetting of a work piece when the cutting direction is changed by 90 degrees. SOLUTION: The cutting device has a chuck table for holding a work piece, a spindle unit with a rotary spindle for mounting a cutting blade for performing cutting process for a work piece held by the chuck table and a spindle unit supporting mechanism supporting the spindle unit movably in a cutting direction. A spindle unit supporting mechanism has a work piece moving base, a guide rail which is provided to the moving base and has a prescribed curvature radius, a spindle unit supporting member which is disposed movably along the guide rail for mounting a spindle unit and an angle adjustment mechanism for moving adjustment of the spindle unit supporting member along the guide rail.</p>
申请公布号 JP2003124155(A) 申请公布日期 2003.04.25
申请号 JP20010315751 申请日期 2001.10.12
申请人 DISCO ABRASIVE SYST LTD 发明人 KABASAWA TAKAYUKI
分类号 H01L21/304;B28D5/02;(IPC1-7):H01L21/304 主分类号 H01L21/304
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