| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a cassette for storing wafers wherein the coming-off of a retaining member which is generated together with a wafer is prevented when the wafers are carried and the heat of the wafers is eliminated effectively, and to provide semiconductor manufacturing equipment to which such a cassette for storing wafers is attached. SOLUTION: This cassette 22 for storing wafers is provided with a stage 24 wherein a plurality of trenches 36 are formed on an upper surface 26, and the retaining members 42 for retaining the wafers W which are slidable relative to the stage 24, in the longitudinal direction of the trenches 36, and arranged in the respective trenches 36 so as to be restrained in the direction perpendicular to the longitudinal direction and parts of which are protruded from the upper surface 26.</p> |
