SEMICONDUCTOR DEVICE PROVIDED WITH FUNCTION OF INSTANTLY DETECTING SELF-ALIGNMENT CONTACT HOLE DEFECT AND PROCESSING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor device provided with a function of instantly detecting any defect of self-alignment contact holes and a processing method therefor. SOLUTION: The semiconductor device has an active region and at least two regions for detection formed on a semiconductor substrate. The active region has a first gate on both sides thereof a side wall is formed; at least one first contact hole formed between the side walls; a first contact plug formed in the first contact hole; and a first contact region to be connected with the first contact plug. The regions for detection have a plurality of second gates on both sides thereof a side wall is to be formed; second contact holes which expose the second gates; second contact plugs formed in the second contact holes; and a second contact region to be electrically connected with the first contact region.