| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam equipment which prevents dielectric breakdown between electrodes of an electron optics system, especially that in multiple beams, and a device manufacturing method using the electron beam equipment. SOLUTION: At least one of the lens electrodes inside a primary or a secondary optical system is coated with metal with work function of not less than 4.5 eV. Metal with which the lens electrodes inside the first or the second optical system are coated are to be platinum, iridium, ruthenium, rhenium, osmium, or an alloy with platinum as a main material.
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