| 摘要 |
PROBLEM TO BE SOLVED: To prevent a flexible holder-cooling heat conductive member connecting a sample holder and a cooling heat source from getting in contact with other members at time of movement of the sample and thus to prevent cooling heat from getting away to the other members. SOLUTION: The holder tip cooling device is provided with holder-cooling heat conductive members (71, 66, 76; 72, 67, 78) connecting an inward-protruding part Ha of a sample holder H airtightly penetrating a holder-mounting hole penetrating a body tube from the direction almost vertical to charged particle beam and holding a sample at the inner end with coolant tanks 68, 69, and conducting cooling heat of the coolants to the sample holder, and the above holder-cooling heat conductive members (71, 66, 76; 72, 67, 78) having flexible strip-shaped heat-conductive members 76, 78 spirally wound around the inward- protruding part Ha with inner ends of those spiral parts 76a, 78a connected to the inward-protruding part Ha of the sample holder H.
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