发明名称 SEMICONDUCTOR DEVICE HAVING CAPACITOR ELEMENT AND ITS INSPECTION METHOD
摘要 PROBLEM TO BE SOLVED: To measure the leak current of a capacitor element accurately without being ristricted by the breakdown voltage of a semiconductor element connected in parallel with the capacitor element. SOLUTION: Capacitor elements 6 and 7 are connected in series and an inspection terminal 8 is provided at the connecting point. Furthermore, a field effect transistor 4 is connected in parallel with the capacitor elements 6 and 7. A DC voltage of 10 V or above is applied between the inspection terminal 8 and a Vs terminal 1 and between the terminal 8 and a Vd terminal 2, and then leak currents of the capacitor elements 6 and 7 are measured. A determination can be made whether the capacitor element is faulty or not.
申请公布号 JP2003124327(A) 申请公布日期 2003.04.25
申请号 JP20010314063 申请日期 2001.10.11
申请人 MURATA MFG CO LTD 发明人 HIMEDA TAKASHI
分类号 H01L27/04;H01L21/822;H01L27/095;(IPC1-7):H01L21/822 主分类号 H01L27/04
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