| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card where the number of similarly measured DUTs and a similarly measured DUT array can easily be changed and a needle can easily be exchanged. SOLUTION: The probe card is provided with a card body part 10 and one or a plurality of needle units 20. The needle unit 20 is provided with a frame body 21 and the plurality of needles. One end of the needle is pulled outward from the side of the frame body 21 and the other end of the needle is pulled out inside/downward from the frame body 21. The card body part 10 is provided with a substrate 11, a plurality of through holes 12 formed on the substrate 11 and a connection part which is disposed on the inner face of the substrate 11 in each through hole 12 and which electrically connects one end of the needle with wiring. The needle unit 20 is fitted so that it can attached to/detached from the through hole 12 of the card body part 10.
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