LIQUID METAL ION SOURCE

摘要

PROBLEM TO BE SOLVED: To provide a liquid metal ion source that generates stable ion beams continuously for a long time. SOLUTION: A needle member 4 of which one of the top end is formed in needle shape and penetrates through the thin hole 2 and the other end is fixed on the side of the reservoir 1 is provided in the reservoir 1 housing the liquid metal 3. A filament 6 is fixed on the side of the reservoir 1 and a heating current is supplied from the heating power source 9 to the filament through a terminal 8 supported by an insulating support body 7. The draw-out power source 12 impresses a positive draw-out high voltage on the needle member 4 and the draw-out electrode 20. The accelerating power source 13 impresses a positive accelerating high voltage between the needle member 4 and a cathode electrode 21. A sputter particle shielding member 15 is provided on the needle member 4 side of the cathode electrode 11. The sputter particle shielding member 15 has a hollow circular truncated cone shape widening toward the cathode electrode 11 side.