发明名称 PATTERNING METHOD, SEMICONDUCTOR DEVICE, ELECTRIC CIRCUIT, DISPLAY MODULE, COLOR FILTER AND LIGHT EMITTING ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a patterning method capable of reducing a production cost by simplifying production processes. SOLUTION: The patterning method comprises a step for depositing a resist film on the surface of a member being treated (S270), a step for forming a recess of wiring pattern by the resist film (S272), a step for subjecting the surface of the resist film to liquid repellent treatment for a solution of patterning material (S274), a step for subjecting the recess of the wiring pattern to lyophilic treatment (S276), a step for filling the recess of the wiring pattern with the solution of patterning material (S280), and a step for removing the resist film to leave the wiring pattern of the patterning material (S296).
申请公布号 JP2003124213(A) 申请公布日期 2003.04.25
申请号 JP20010311184 申请日期 2001.10.09
申请人 SEIKO EPSON CORP 发明人 TAKAGI KENICHI;SATO MITSURU
分类号 G02F1/1335;G02F1/1368;H01L21/283;H01L21/288;H01L21/3205;H01L51/50;H05B33/10;H05B33/14 主分类号 G02F1/1335
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