发明名称 |
PATTERNING METHOD, SEMICONDUCTOR DEVICE, ELECTRIC CIRCUIT, DISPLAY MODULE, COLOR FILTER AND LIGHT EMITTING ELEMENT |
摘要 |
PROBLEM TO BE SOLVED: To provide a patterning method capable of reducing a production cost by simplifying production processes. SOLUTION: The patterning method comprises a step for depositing a resist film on the surface of a member being treated (S270), a step for forming a recess of wiring pattern by the resist film (S272), a step for subjecting the surface of the resist film to liquid repellent treatment for a solution of patterning material (S274), a step for subjecting the recess of the wiring pattern to lyophilic treatment (S276), a step for filling the recess of the wiring pattern with the solution of patterning material (S280), and a step for removing the resist film to leave the wiring pattern of the patterning material (S296). |
申请公布号 |
JP2003124213(A) |
申请公布日期 |
2003.04.25 |
申请号 |
JP20010311184 |
申请日期 |
2001.10.09 |
申请人 |
SEIKO EPSON CORP |
发明人 |
TAKAGI KENICHI;SATO MITSURU |
分类号 |
G02F1/1335;G02F1/1368;H01L21/283;H01L21/288;H01L21/3205;H01L51/50;H05B33/10;H05B33/14 |
主分类号 |
G02F1/1335 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|