| 摘要 |
PROBLEM TO BE SOLVED: To provide an aligner which is capable of eliminating the effect of a temperature change with a heating value change in a heating element and improving its positioning accuracy and measurement reproducibility. SOLUTION: The aligner is equipped with a temperature sensor 1 which detects the heating value of a heating element 11, an exhaust air-flow computing unit 2 which computes an exhaust airflow rate on the basis of the heating value of the heating element 11, a flow rate control valve 3 which controls the exhaust airflow rate on the basis of the output of the exhaust air-flow computing unit 2, and a no-heat load exhaust path 4 which is equipped with the flow rate control valve 3 and kept free from a heat load.
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