发明名称 SHEET-LIKE CONNECTOR, MANUFACTURING METHOD AND PROBE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a sheet-like connector whose diameter is small, whose ratio of projected height against the diameter is high, in which an electrode structure having the surface electrode part of high size precision can be formed and a stable electric connection state can surely be obtained for a circuit device where an electrode is formed with a small pitch. SOLUTION: The sheet-like connector 10 has an insulating sheet 11 and multiple electrode structures 15 where the projected surface electrode parts 16 exposed to the surface of the insulating sheet 11 and back electrode parts 17 exposed to the back of the insulating sheet 11 are connected by shorting parts 19 extending through the insulating sheet 11 in the thickness direction. The surface electrode parts 16 in the electrode structures 15 are formed in such a way that pattern holes in a resist film having the pattern holes corresponding to the surface electrode parts 16, which are formed on the surface of the insulating sheet 11, are filled with metal.
申请公布号 JP2003124272(A) 申请公布日期 2003.04.25
申请号 JP20010320541 申请日期 2001.10.18
申请人 JSR CORP 发明人 SATO KATSUMI;IGARASHI HISAO;INOUE KAZUO
分类号 G01R1/06;H01L21/66;H01R11/01;H01R43/00;(IPC1-7):H01L21/66 主分类号 G01R1/06
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