| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser device that easily controls to decrease the wavelength component not selected. SOLUTION: This laser device is provided with a laser resonator that comprises a laser chamber 1 and an ignition electrode 12 and generates laser beam containing at least first and second wavelength components, a wavelength selective means 100 that makes the laser resonator mainly generate the first wavelength component, a gas controller 9 that adjusts laser gas filling the laser chamber, a power source part 11 that applies voltage to the ignition electrode, a detecting means 200 that detects intensity of the laser beam outputted from the laser resonator for a plurality of wavelength components, and a control means 8 that controls at least one out of the wavelength selective means, the gas controller and the power source part based on at least the intensity of the first and second wavelength components detected by the detecting means.
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