| 摘要 |
A simulation apparatus 20A includes an operation terminal 21, display section 22, simulation section 23, and unit shape data 24. The simulation section 23 is synchronized with an actual exposure apparatus in real time, and executes three-dimensional simulation in accordance with the operation (control command) of each unit 13 to be controlled. A control command is sent from the apparatus controller 12 to the unit 13 and at the same time to the simulation section 23. Upon reception of the control command, the simulation section 23 operates the unit 13 in accordance with the instruction of the control command, and executes simulation.
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