Wafer rack for receiving and transporting wafers for semiconductor technology processing, comprises two opposing housing plates connected by lateral slats

摘要

A wafer rack (1) for receiving and transporting wafers for semiconductor technology processing, comprises two opposing housing plates (2) connected by lateral slats (3). The plates have equidistant vertical slots (6). The regions between the slats enable a process medium to pass through the inner wafer rack region. The rack consists at least partially of PEEK.