Very high sensitivity magnetic sensor

摘要

The present invention relates to a magnetic sensor which comprises a thin deformable membrane (3) made of a conductive material constituting a first plate of a capacitor and coursed by an electric current, a second capacitor plate consisting of a doped region of a semiconductor substrate (1), and a layer of a gaseous dielectric (6) separating the two plates. The membrane deforms due to the effect of the Lorentz force generated by a magnetic field lying in the plane of the membrane and perpendicular to the lines of current. In addition, the invention relates to a process for fabricating this magnetic sensor and to a device for measuring magnetic field.