LASER HYBRIDISATION

摘要

A waveguide is formed by using a single mask to define waveguide features and alignment features on the core layer. Etch stop is retained on the alignment features when the cladding layer is added and a second mask defined which defines a mechanical stop and a waveguide facet aligned to the stop. The mask area is etched down to the substrate apart from the protected alignment features. Laser and other components can be attached. Lasers may be attached by solder bumps and have their own alignment feature spaced from the laser facet.