Selektives Trockenätzen eines dielektrischen Films,申请号DE20001016938-传众专利搜索

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发明名称	Selektives Trockenätzen eines dielektrischen Films
摘要
申请公布号	DE10016938(C2)	申请公布日期	2003.04.24
申请号	DE20001016938	申请日期	2000.04.05
申请人	INTERNATIONAL BUSINESS MACHINES CORP., ARMONK	发明人	BENNETT, DELORES A.;NORUM, JAMES P.;YAN, HONGWEN
分类号	H01L21/302;H01L21/3065;H01L21/311;H01L21/318;(IPC1-7):C23F4/00	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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