发明名称 HEATING MEDIUM CIRCULATING DEVICE AND THERMAL TREATMENT EQUIPMENT USING THE DEVICE
摘要 A heating medium circulating device for temperature control having a small size and less requiring an installation space, wherein a temperature-controlled body as an object for temperature control, a main heat exchanger 88 for exchanging heat mainly with heating medium, and a circulating pump 84 are installed in a heating medium circulating system 78, and an auxiliary heat exchanger 96 using a thermoelectric cooling element 100 is installed in the heating medium circulating system on the downstream side of the main heat exchanger for controlling the temperature of the heating medium, whereby the size of the device can be reduced and the installation space thereof can also be less required.
申请公布号 WO03033973(A1) 申请公布日期 2003.04.24
申请号 WO2002JP10383 申请日期 2002.10.04
申请人 TOKYO ELECTRON LIMITED;YAMAZAKI, KOICHI 发明人 YAMAZAKI, KOICHI
分类号 F25B21/02;C23C16/46;F28D21/00;H01L21/00;H01L21/205;H01L21/22;H01L21/26;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):F25B21/02;F25D11/00;F25D9/00;H01L21/02 主分类号 F25B21/02
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