发明名称 SEMICONDUCTOR STRUCTURE HAVING COMPENSATED RESISTANCE IN THE LDD REGION, AND METHOD FOR PRODUCING THE SAME
摘要 The invention relates to a semiconductor structure comprising a substrate (100), a source region (110) which is formed in the substrate (100), a drain region which is formed in the substrate (100), and a dopant having a first type of conductivity. The drain region comprises a first drain section (112) having a first dopant concentration and a second drain section (116) having a second dopant concentration, the first dopant concentration being higher than the second dopant concentration. A first area (118) is formed in the second drain section (116), said first area comprising a dopant having a second type of conductivity which is different to the first type of conductivity. Furthermore, a second area (120) is formed in the substrate (100), below the second drain section (116), said second area comprising a dopant having the first type of conductivity. A channel region is provided in the substrate, between the source region (110) and the second drain section (116).
申请公布号 WO03034499(A2) 申请公布日期 2003.04.24
申请号 WO2002EP09702 申请日期 2002.08.30
申请人 INFINEON TECHNOLOGIES AG;TADDIKEN, HANS 发明人 TADDIKEN, HANS
分类号 H01L21/265;H01L21/336;H01L29/06;H01L29/08;H01L29/78 主分类号 H01L21/265
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