| 摘要 |
The problem with a micro-functional unit produced by hybrid-integration microstructure technology, comprising microcomponents which can be used in microstructure technology and codetermine the functioning of the micro-functional unit and at least one support comprising a piece of flat material for receiving the microcomponents, is that of positioning at least some of the microcomponents exactly relative to the support, which can be accomplished in that a freely extending finger is formed from the piece of flat material of the respective support by means of two openings located opposite one another and passing through the entire support and that the finger serves as a holding element for one of the microcomponents.
|
