发明名称 Structure of vacuum chuck for absorbing substrate
摘要 A structure of a vacuum chuck for absorbing a substrate and usable in the fabrication of a liquid crystal display device is provided. This structure includes an absorbing plate absorbing a surface of the substrate, and a plurality of vacuum lines in an oblique line shape on the absorbing plate.
申请公布号 US2003075849(A1) 申请公布日期 2003.04.24
申请号 US20020252722 申请日期 2002.09.24
申请人 CHOI MOON-HO 发明人 CHOI MOON-HO
分类号 H01L21/68;B25B11/00;(IPC1-7):B25B11/00 主分类号 H01L21/68
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