PROBE PIN, PROBE CARD, TEST APPARATUS, AND METHOD OF MANUFACTURING PROBE PIN

摘要

A probe pin and a method of manufacturing the probe pin, the probe pin having a first surface, a second surface generally parallel with the first surface and having an area larger than that of the first surface, and four third surfaces generally perpendicular to the first surface comprising a contact part coming into contact with an electronic component and an elastic part having the contact part; the method of manufacturing the probe pin comprising the steps of preparing a silicon substrate having a surface {100}, forming a mask, having a rectangular opening with four sides in a direction <100> in the surface of the silicon substrate, forming a groove part by anisotropic wet etching, and filling conductive material in the formed groove part.