发明名称 |
Apparatus and method for handling, storing and reloading carriers for disk-shaped items, such as semiconductor wafers or CDs |
摘要 |
An apparatus for handling, storing and reloading carriers for disk-shaped items, such as semiconductor wafers or CDs, has at least one cleaning unit and at least one storage unit for the carriers containing the disk-shaped items. The apparatus further has at least one sorting unit for the disk-shaped items. The cleaning unit, the storage unit and the sorting apparatus are integral component parts of the apparatus and are operated by a common automatic control.
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申请公布号 |
US2003076752(A1) |
申请公布日期 |
2003.04.24 |
申请号 |
US20020298831 |
申请日期 |
2002.11.18 |
申请人 |
LERING MICHAEL;MISSALE REINER;PEITER MARTIN |
发明人 |
LERING MICHAEL;MISSALE REINER;PEITER MARTIN |
分类号 |
B08B7/00;H01L21/00;H01L21/304;H01L21/677;(IPC1-7):G11B7/085 |
主分类号 |
B08B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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