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发明名称
Verfahren zur Herstellung eines Halbleiterbauelements mit einem kapazitiven Element
摘要
申请公布号
DE69529942(D1)
申请公布日期
2003.04.24
申请号
DE19956029942
申请日期
1995.06.14
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
FUJII, EIJI;INOUE, ATSUO;ARITA, KOJI;NASU, TORU;MATSUDA, AKIHIRO
分类号
H01L27/04;H01L21/02;H01L21/3105;H01L21/324;H01L21/768;H01L21/822;H01L27/10;(IPC1-7):H01L21/320
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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