| 摘要 |
An interferometric optical microscopy system for imaging an object, the system including: a measurement beam mask array having an array of aperture pairs positioned to receive radiation emitted from the object in response to a measurement beam, radiation emerging from the array of aperture pairs defining a measurement return beam; a reference beam source array positioned to receive a reference beam, the reference beam source array comprising an array of elements each configured to radiate a portion of the reference beam, the radiated reference beam portions defining a reference return beam; and imaging optics positioned to direct the measurement and reference return beams to the photo-detector and configured to produce overlapping conjugate images of the array of reference elements and the array of aperture pairs, wherein the conjugate image for each aperture pair overlaps with the conjugate image of a corresponding reference element, wherein the imaging optics include a pinhole array positioned in the conjugate image plane, the pinhole array having an array of pinholes each aligned with a corresponding aperture pair image, and wherein the measurement and reference beams are derived from a common source. |
