发明名称 DRESSER FOR POLISHING PAD
摘要 PROBLEM TO BE SOLVED: To provide a dresser for polishing pad capable of remarkably shortening a time required for the quality of the surface of a hard disk substrate as a work to meet the specified values and increasing a dressing performance to such a degree that dummy polishing can be actually eliminated. SOLUTION: This dresser 100 for polishing pad is used for dressing the polishing pad for polishing an aluminum substrate for hard disk or a glass substrate for hard disk. Super abrasive grains having an averaged grain size of 5 to 20 μm are fixed, as one layer of abrasive grain layer 102, onto the surface of the base metal 101 through binding agent.
申请公布号 JP2003117823(A) 申请公布日期 2003.04.23
申请号 JP20010311296 申请日期 2001.10.09
申请人 KOHAN KOGYO KK;ALLIED MATERIAL CORP 发明人 FUJISHIGE HIROSHI;MASUSHIGE TAKASHI;HAYASHI JUNICHI;ASAHINO HAJIME;FUKUSHIMA KENJI
分类号 B24B53/12;B24B53/017;B24B53/02;B24D3/00;B24D3/06;B24D7/02 主分类号 B24B53/12
代理机构 代理人
主权项
地址