发明名称 |
DRESSER FOR POLISHING PAD |
摘要 |
PROBLEM TO BE SOLVED: To provide a dresser for polishing pad capable of remarkably shortening a time required for the quality of the surface of a hard disk substrate as a work to meet the specified values and increasing a dressing performance to such a degree that dummy polishing can be actually eliminated. SOLUTION: This dresser 100 for polishing pad is used for dressing the polishing pad for polishing an aluminum substrate for hard disk or a glass substrate for hard disk. Super abrasive grains having an averaged grain size of 5 to 20 μm are fixed, as one layer of abrasive grain layer 102, onto the surface of the base metal 101 through binding agent. |
申请公布号 |
JP2003117823(A) |
申请公布日期 |
2003.04.23 |
申请号 |
JP20010311296 |
申请日期 |
2001.10.09 |
申请人 |
KOHAN KOGYO KK;ALLIED MATERIAL CORP |
发明人 |
FUJISHIGE HIROSHI;MASUSHIGE TAKASHI;HAYASHI JUNICHI;ASAHINO HAJIME;FUKUSHIMA KENJI |
分类号 |
B24B53/12;B24B53/017;B24B53/02;B24D3/00;B24D3/06;B24D7/02 |
主分类号 |
B24B53/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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