PELLICLE AND METHOD FOR FABRICATING MASK WITH THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a pellicle which can be reused when a mask with the pellicle is a reject in inspection of the mask because the pellicle can easily be peeled from the mask and which does not easily peel when the mask passes the inspection. SOLUTION: In the pellicle with a pellicle membrane stretched on one opening of a pellicle frame and an adhesive layer for attachment to a mask disposed on the other opening, a temperature-sensitive adhesive whose adhesive power varies in accordance with the environmental temperature is used in the adhesive layer.