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发明名称
VERY NARROW BAND LASER WITH UNSTABLE RESONANCE CAVITY
摘要
申请公布号
EP0992092(B1)
申请公布日期
2003.04.23
申请号
EP19980926365
申请日期
1998.06.05
申请人
CYMER, INC.
发明人
ERSHOV, ALEXANDER I.
分类号
G02B5/18;G03F7/20;H01S3/08;H01S3/1055;H01S3/13;H01S3/137;H01S3/225;(IPC1-7):H01S3/08;H01S3/105
主分类号
G02B5/18
代理机构
代理人
主权项
地址
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