SEMICONDUCTOR MANUFACTURING/TESTING CERAMIC HEATER, PRODUCTION METHOD FOR THE CERAMIC HEATER AND PRODUCTION SYSTEM FOR THE CERAMIC HEATER

摘要

An object of the present invention is to provide a ceramic heater for a semiconductor producing/examining device wherein resistance heating elements which do not cause a short circuit and the like, are relatively inexpensive and have a precise pattern can be formed. The present invention is a ceramic heater for a semiconductor-producing/examining device comprising a ceramic substrate and a resistance heating element formed on the ceramic substrate, wherein trimming is performed on said resistance heating element.