发明名称 FILM, PACKAGING MATERIAL, CONTAINER, LENS, WINDOW, SPECTACLES, RECORDING MEDIUM, AND FILM MAKING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide an apparatus for making a thin film which can control deterioration by water, oxygen, carbon dioxide, the diffusion of impurities such as alkali metals and alkaline earth metals, etc., has high barrier properties, is free from problems of safety and hygiene, and has high light transmittance and a product coated with the thin film by the apparatus, to expand the range of products which can use an environment-friendly biodegradable material, and to extend a quality guarantee period. SOLUTION: A single layer of an AlNxOy film 106 or an AlxNy film, or the laminated layer of the films is formed on the inner surface of a packaging film 105. The single layer or the laminated layer is high in light transmittance and can improve gas-barrier properties to water, oxygen, and carbon dioxide, heat resistance, and mechanical strength. When the environment-friendly material is used as the packaging film, the range of the usable products is expanded, and the quality guarantee period can be extended.
申请公布号 JP2003118028(A) 申请公布日期 2003.04.23
申请号 JP20010313128 申请日期 2001.10.10
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI;KUWABARA HIDEAKI;TAKAYAMA TORU
分类号 G02B1/10;B32B9/00;C08J7/06;C23C14/04;C23C14/06;C23C14/34;H01L51/52 主分类号 G02B1/10
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