GASKET MEMBER FOR SUBSTRATE STORAGE CONTAINER AND THE SUBSTRATE STORAGE CONTAINER USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a gasket member for a substrate storage container with which only a little quantity of organic ingredient is generated, there is a little contamination of a stored substrate by an organic substance, and operability in opening/closing a lid is not degraded, and to provide a substrate storage container employing the gasket member. SOLUTION: The gasket member for a substrate storage container is made of a thermoplastic polyester-based elastomer resin wherein surface hardness measured by an A-type spring hardness test method of JIS K6301 is 80A or less, an outgassing quantity measured by a dynamic head space method under a heating condition of 80 deg.C for 60 minutes is 10 ppm or less for a material weight, and the resin contains no softener.