| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a table apparatus capable of easily achieving compactness and thinness, while capable of moving in a large number of directions. SOLUTION: The X-Yθtable apparatus 100 is constituted, by laminating and arranging a fixing support body 101, an X table 102, and a Y table 103. The X table 102 is provided for the fixing support body 101, to be moved along the direction of the X-axis. The Y table 103 is provided for the X table 102, in such a way as to be moved in the direction of the Y-axis. A rotating motor 104 is held at the Y table 103, and a rotor 151 of the rotating motor 104 is driven to rotate by supplying a current for a coil 160 provided for the upper surface of the X table 102.</p> |
