| 摘要 |
PROBLEM TO BE SOLVED: To provide a touch sensor which reduces a measuring force and by which the fine shape on the surface of a specimen can be measured nondestructively without damaging the specimen. SOLUTION: An operation control structure for the touch sensor 10 which is provided with a stylus 12 comprising a probe 12A coming into contact with the specimen W at the tip is constituted so as to comprise an excitation circuit 3 which vibrates the stylus 12 in an axial direction, a detection circuit 4 which detects a change in the vibration of the stylus 12, an adjusting mechanism 5 which removes a noise applied to an output signal from the detection circuit 4, a fine adjustment mechanism controller 6 which controls the operation of a fine adjustment mechanism 21 in such a way that a change in the state quantity of a detection signal becomes definite, and a PZT drive circuit 7 which operates the mechanism 21. Without contriving the shape and the constitution of the touch sensor, the measuring force in the measurement of the shape on the surface can be adjusted by adjusting an electrical AC signal applied to the touch sensor and by reducing the noise applied to the detection signal. |
