LENGTH MEASURING METHOD FOR SAMPLE AND SACCNING MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a length measuring method for a sample in which a length measurement error due to a beam diameter size can be reduced and to provide a scanning microscope. SOLUTION: In the length measuring method for the sample in which the length of a length measuring object on the sample is measured, the length measured value of the length measuring object obtained on the basis of a secondary signal is corrected by a value related to a beam diameter size value.