| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe, capable of achieving certain contact, capable of coping with the narrowing of a pitch and constituted, to be capable of inspecting measuring points scattered in a planar shape for solving the problem of linear inspection is performed in a conventional method, and facial inspection having to be performed, while an inspection device is moved successively gradually, a multiprobe using the probe and an electric circuit inspection device. SOLUTION: The probe comprises a substrate, which has a probe, signal wiring extracting electrical signal from the probe, a capacity element, an induction element and a photoelectric conversion element provided to the end part thereof, and the counter electrode facing opposite to the capacity element and the photoelectric conversion element. The capacity element and the induction element form an antenna.
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