ELECTRON SPECTROSCOPIC ANALYZER FOR X-RAY FLUORESCENCE

摘要

PURPOSE: An electron spectroscopic analyzer is provided to simultaneously perform an X-ray fluorescence analysis and an X-ray electronic analysis by allowing the X-ray induced electron emission spectroscopy to have functions of an X-ray fluorescence analyzer and an X-ray electronic analyzer. CONSTITUTION: An electron spectroscopic analyzer includes a light source(11) for generating X-ray. A first slit is provided in the X-ray induced electron emission spectroscopy in order to shield an emission of X-ray while allowing X-ray having a predetermined width. A single-crystalline drum(15) is provided in the X-ray induced electron emission spectroscopy. The single-crystalline drum(15) has a plurality of single-crystalline monochrometers for allowing X-ray to be changed into a diffractive wave. A second slit(17) is provided to allow X-ray having a specific energy to pass through. A sample is provided in a sample holder(19).