发明名称 COMPOSITION CONSTITUENT-MEASURING APPARATUS USING LASER
摘要 PROBLEM TO BE SOLVED: To accurately measure composition constituents even if the generation timing of plasma light that is generated from each composition constituent differs. SOLUTION: When laser beams are applied to a measurement target to develop a plasma, plasma light is generated from each composition constituent while being shifted in terms of time. The plasma light is condensed by a lens 15, is transmitted by optical fibers 122 and 123, and is dispersed by a spectroscope 116. The dispersed spectrum light is photographed by a CCD camera 117, thus identifying the composition constituent or detecting the concentration based on the photographed image (spectrum state). The CCD camera 117 starts photographing at timing when spectrum light obtained by dispersing plasma light that is generated before and is transmitted through the long optical fiber 123 and spectrum light obtained by dispersing plasma light that is generated later and is transmitted through the short optical fiber 122 are simultaneously outputted from the spectroscope 116, thus simultaneously photographing the spectrum light corresponding to each composition constituent for generating plasma light while being shifted in terms of time and accurately measuring the composition constituent.
申请公布号 JP2003121359(A) 申请公布日期 2003.04.23
申请号 JP20010311381 申请日期 2001.10.09
申请人 MITSUBISHI HEAVY IND LTD 发明人 DEGUCHI YOSHIHIRO
分类号 G01N21/63;(IPC1-7):G01N21/63 主分类号 G01N21/63
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