| 摘要 |
PROBLEM TO BE SOLVED: To surely cool a sealing member 35 for sealing between valve elements 15, 34 and a valve casing 6 by properly changing the flow rate and pressure of the cooling fluid circulated in cooling passages 15a, 34a formed by the valve elements 15, 34 in the valve casing 6, and to miniaturize the device. SOLUTION: This vacuum gate valve comprises a cooling fluid supplying part 49 expandable in the moving direction of the valve elements 15, 34, and capable of supplying the cooling fluid to the cooling passages 15a, 34a regardless of positions of the valve elements 15, 34, and the cooling fluid supply part 49 is composed of a spiral tube 50 in which the cooling fluid is circulated, bellows 58 mounted around the spiral tube 50 for air-tightly defining the inside of the valve casing 6, and a reinforcement member 48 composed of a telescopically expandable cylindrical member preventing the buckling of the bellows 58.
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