发明名称 SUCTION NOZZLE AND WORK SUCTION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a suction nozzle having plural functions required for han dling of electronic components and installing process, saving a space, and having multi-function. SOLUTION: A suction hole 2 is formed in a center part of a suction nozzle portion 1, and a vacuum supplying hole 3 for vacuum-suction is formed in a nozzle base side end portion of the suction hole 2. The suction nozzle portion 1 is inserted in a collar 4, and stuck to the collar 4 in an air-tight state near a nozzle base side. A clearance 5 is provided between the suction nozzle 1 and the collar 4 near a nozzle tip end, an upper end part of the clearance 5 is connected to a space portion 7. A supplying hole 6 for supplying compressed gas or evacuating is formed on a side surface of the collar 4, and the supplying hole 6 is connected to the space portion 7. Work is gripped by using the suction hole 2, and air-blowing, nitrogen-purging, static-elimination, heating, cooling, flux-elimination are conducted through the supplying hole 6, the space portion 7, and the clearance 5.
申请公布号 JP2003117871(A) 申请公布日期 2003.04.23
申请号 JP20010317567 申请日期 2001.10.16
申请人 NEC CORP 发明人 IDE TAKAHARU
分类号 B25J15/06;H01L21/677;H01L21/68;H05K13/04 主分类号 B25J15/06
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