发明名称 POLISHING METHOD AND POLISHING DEVICE AND OPTICAL ELEMENT OR ITS METAL MOLD
摘要 PROBLEM TO BE SOLVED: To highly accurately polish an optical element or its metal mold in a short time without generation of microscopic meandering flaw caused by scanning by a tool. SOLUTION: This polishing device is provided with an auxiliary member 42 arranged in an outer peripheral position of an optical functional surface of a workpiece, and a pressing member 41 corresponding to a surface shape of the workpiece and the auxiliary member, and performs polishing work of the optical functional surface of the workpiece by travel of a sheet member by making the sheet member having the polishing function travel between the workpiece, the auxiliary member and the pressing member.
申请公布号 JP2003117791(A) 申请公布日期 2003.04.23
申请号 JP20020155752 申请日期 2002.05.29
申请人 CANON INC 发明人 YOKOTA MASAAKI
分类号 B24B13/02;B24B21/16;(IPC1-7):B24B13/02 主分类号 B24B13/02
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