CONTACT PROBE, ITS MANUFACTURING METHOD, INSPECTION DEVICE FOR IT, AND INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a simply-structured contact probe and an inspection device capable of breaking an insulating film on an inspected circuit surface even by a low contact pressure for securing proper electric contact. SOLUTION: This contact probe is constructed of a tip part 11, which is provided with a contact end touching the inspected circuit in on end and formed into a cylinder as a whole, and a base part 12 arranged at an interval to the tip part opposedly to the other end on the opposite side to the contact end of the tip part. When the tip part 11 is pressed to the inspected circuit, an end face 14 in the tip part and an end part face 15 in the base part are brought into contact with each other, and the tip part 11 is shifted to be moved in the direction parallel to the surface of the inspected circuit because the contact faces are tilted to the pressing direction. In this way, the insulating film on the tested circuit surface can be scraped out. This inspection device is constructed by using this contact probe.