| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring apparatus by which the surface shape of a specimen can be measured in a short time and with high accuracy. SOLUTION: A sensor 11 and a sensor 12 which form a pair with a beam splitter 7 and a beam splitter 8 are installed respectively on the route of one luminous flux emitted from a first light source 3, angles of the luminous flux are simultaneously measured in a state that it advances to the sensors 11, 12 directly (without being reflected by the specimen) from the beam splitters 7, 8, the difference in the zero point between the two sensors is detected, its result is used for a correction, and an angle difference due to the two sensors is output with high accuracy. By using a luminous flux emitted from a light source 4 arranged so as to face the light source 3, angles of inclination of reflected light from two points on the surface of the specimen are simultaneously sampled while a rotating disk 2 is being turned, and the difference between the angles of inclination from the two points can be measured in the same manner as during the standstill of the rotating disk.
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