PRECISION SHAPE MEASURING METHOD USING LASER BEAM

摘要

PROBLEM TO BE SOLVED: To provide a precision shape measuring method using a laser beam in which the laser beam can be irradiated precisely and easily at a prescribed part to be measured in an extremely small region so as to enhance its measurement accuracy. SOLUTION: A reference plate 1 is installed to be adjacent to a measuring object T, a slit S which is extended between the reference plate 1 and the measuring object T is formed, the thin and flat sheetlike laser beam L in a direction in which the slit S is extended is irradiated toward the part Q to be measured at the measuring object T on the slit S, and a diffraction pattern formed by the laser beam L passed through the slit S in the part Q to be measured is measured.